Korea National Institute of Rare Metals
RESEARCH
RESEARCH
Pulsed Laser Annealing(PLA) system development for thin film crystallization
- Research and Develop of Pulsed Laser Annealing(PLA) System’s HW & SW
- Research of HfxZr1-xO2 thin film crystallize to enhance ferroelectricity of Ferroelectric Field-effect Transistor(FeFET)
- Research of amorphous silicon thin film to Low Temperature Poly-Crystalline Silicon(LTPS) thin film